PBN

Introduction MOCVD（Metal-organic Chemical Vapor Deposition）is a special process to grow semiconductor thin films on the matrix. It was developed on the basis of vapor phase epitaxial (VPE) growth, and has become a new technology in VPE. The source materials of crystals grown by MOCVD are metal organic compound and hydride. The metal generally from group Ⅱ or Ⅲ when the later is made by the elements of group V、Ⅵ. The vapor phase epitaxial growth on substrates follows the method of thermal decomposition reaction, and gains semiconductive chemical compounds of the group Ⅲ-V,Ⅱ-Ⅵ, and their thin layer crystal materials of multiple solid solution. The resistance wire heater mainly used in the equipment of Thomas (Have been acquired by aixtron). The heating wire is generally made of tungsten, and the reflective liner is made of PBN. Resistance heating takes radiation heat transfer as the mainly principal. To achieve a completely uniform temperature distribution, it optimizes structure of

Introduction The PBN/PG ceramic heater combines three layers of ultra-high purity ceramics, PBN-PG-PBN to produce an advanced micro-ceramic heating element system. Both our PBN heater (Pyrolytic Boron Nitride) and PG heater (Pyrolytic Graphite) are manufactured by high temperature CVD. These high performance elements exhibit outstanding thermal properties in a ceramic heater, including high thermal conductivity and anisotropy.

PBN Insulator Plate www.semixicon.com

PBN Coating     1.  Product Instruction                In High temperature, high vacuum, and High purity environment,      PBN is usually used as coating material to protect the graphite.      PBN coating can avoid the graphite heating unit to volatilize in high temperature        2.   Product Feature                    High purity (99.999%)       High insulativity       Low outgassing in high temperature       Coating can combined with substrate tightly, not easy to peel off       High resistivity to chemical corrosion in high temperature       High density and effectively prevent volatilization of substrate www.semixicon.com

PBN Plate 1.  Product Instruction                   PBN is easy procession, can be machined to many kinds shape of parts.      They are applied widely as structural components in high temperature and vacuum environment.       2.   Product Feature                  High Purity (99.999%)      Uniform thickness        High resistivity and insulativity      Low outgassing in high temperature      Inert, no reaction with acid and alkali   Custom sizes are available* www.semixicon.com

PBN Rod         1.  Product Instruction                   PBN is easy to be machined as High-power microwave components.      Such as  (TWT) support rod material.        2.  Product Features             High Purity (99.999%)       Excellent thermal conductivity      Low dielectric constant      Easy machining and high accuracy      Not easy to deformation in high temperature     www.semixicon.com

PBN Boat  1.  Product Insturction                    Before the compound semiconductor single crystal growth, it is usually required to synthesis        the compound semiconductor polycrystalline material first. PBN Boat is ideal vessel for                  polycrystalline synthesis.          2.  Product Feature                    High Purity (99.999%)         No wetting with melt metal        Thermal conductivity controllable, improve the rate of yield        Excellent thermal shock resistance        Easy cleaning and Reusability        Inert, no reaction with acid and alkali            www.semixicon.com

LEC Crucible  1.  Product Instruction       Liquid Encapsulation Czochralsk (LEC) is a method of using the liquid covering agent to seal          the melt and  control the volatilization to realize crystal growth. LEC Crucible is applied as              vessel of crystal growth in LEC              2.   Product Feature                     High Purity (99.999%)        No wetting with melt metal       Thermal conductivity controllable, improve the rate of yield       Excellent thermal shock resistance       Easy cleaning and Reusability       Inert, no reaction with acid and alkali   Max ID 12" available starting May 1st ,2018 www.semixicon.com

VGF Crucible 1.  Product Instruction       VGF is the main technology for GaAs and InP compound        semiconductor single crystal growth in the world.       VGF crucible is the ideal vessel for single crystal growth by VGF. 2.  Product Feature             High Purity (99.999%)       No wetting with melt metal      Thermal conductivity controllable, improve the rate of yield      Excellent thermal shock resistance      Easy cleaning and Reusability      Inert, no reaction with acid and alkali   www.semixicon.com

   MBE Crucible 1.  Product Instruction       Molecular Beam Epitaxy(MBE) is mainly for crystal epitaxial growth      MBE crucible is mainly applied as beam source crucible in MBE. 2.  Product Feature                 High purity (99.999%)     Low outgassing in high temperature     Uniform thickness, Good consistency in heating     Excellent thermal conductivity and shock resistance     Easy cleaning and Reusability     Inert, no reaction with acid and alkali  www.semixicon.com

 PBN Ring          1.  Product Instruction       PBN Ring is applied widely in the effusion cell of OLED production    2.  Product Feature       High Purity (99.999%)       Uniform thickness        Low outgassing in high temperature      High strength, not easy to deformation www.semixicon.com

   OLED Crucible        1.  Product Instruction               OLED is a kind of new developing advanced display technology.              OLED Crucible is applied as main vessel of  OLED effusion cell.          2.   Product Features               High purity (99.999%)              Low outgassing in high temperature              Uniform thickness, Good consistency in heating              Excellent thermal conductivity and shock resistance              Easy cleaning and Reusability              Inert, no reaction with acid and alkali  Specification ID  (mm) Lip  Diameter (mm) Height (mm) 300cc               55                          70                         160 500cc               55                          82                         190 580cc               62                          84                         186 700cc               61                          85                         240 1200cc             78                      

1.  Product Instruction       Pyrolytic Boron Nitride (PBN) is a kind of advanced ceramic, can be produced with 99.999% purity in high density. It made by ammonia and       Boron halide through Chemical Vapor deposition(CVD) process in high temperature and high vacuum condition:NH3 +BX3=BN+3HX   , it can         be produced as PBN plates, and also can be produced as PBN final products directly like crucible, boat, coating, etc.                 2.   Main Features       It’s different from BN, there is no traditional process of hot pressing, no need any kinds of agglutinant, so the products have very obliviously       features as follow:        ●  Non-toxic and tasteless        ●  High purity(＞99.999%)        ●  No reaction with acid, alkali, salt and other organic reagent at room temperature        ●  A little corrode in melt salt and alkali, but it can resistance any kind of acid in high temperature.        ●  No reaction with melt metal, semiconductor and other compound.

 Parameter of PBN (Pyrolytic Boron Nitride)     Properties Units Values Density g/cm 3 2.00-2.20 Tensile Strength MPa 58 Bending Strength MPa 101 Compression Strength MPa 244 Young's Modulus GPa 25 Poisson Ratio 0.25 Thermal Conductivity W/m°C "a" 92.1     "c" 2 Specific Heat J/g·℃ 0.96（RT） Resistivity Ω.cm "a"5×10 8 , "c"5×10 10 Dielectric Strength D.C. volts/mm 2x10 5 Dielectric Constant "c" 3.07 Metal Impurity Content ppm <10