PBN

Introduction MOCVD（Metal-organic Chemical Vapor Deposition）is a special process to grow semiconductor thin films on the matrix. It was developed on the basis of vapor phase epitaxial (VPE) growth, and has become a new technology in VPE. The source materials of crystals grown by MOCVD are metal organic compound and hydride. The metal generally from group Ⅱ or Ⅲ when the later is made by the elements of group V、Ⅵ. The vapor phase epitaxial growth on substrates follows the method of thermal decomposition reaction, and gains semiconductive chemical compounds of the group Ⅲ-V,Ⅱ-Ⅵ, and their thin layer crystal materials of multiple solid solution. The resistance wire heater mainly used in the equipment of Thomas (Have been acquired by aixtron). The heating wire is generally made of tungsten, and the reflective liner is made of PBN. Resistance heating takes radiation heat transfer as the mainly principal. To achieve a completely uniform temperature distribution, it optimizes structure of

Introduction The PBN/PG ceramic heater combines three layers of ultra-high purity ceramics, PBN-PG-PBN to produce an advanced micro-ceramic heating element system. Both our PBN heater (Pyrolytic Boron Nitride) and PG heater (Pyrolytic Graphite) are manufactured by high temperature CVD. These high performance elements exhibit outstanding thermal properties in a ceramic heater, including high thermal conductivity and anisotropy.

PBN Insulator Plate www.semixicon.com

PBN Coating     1.  Product Instruction                In High temperature, high vacuum, and High purity environment,      PBN is usually used as coating material to protect the graphite.      PBN coating can avoid the graphite heating unit to volatilize in high temperature        2.   Product Feature                    High purity (99.999%)       High insulativity       Low outgassing in high temperature       Coating can combined with substrate tightly, not easy to peel off       High resistivity to chemical corrosion in high temperature       High density and effectively prevent volatilization of substrate www.semixicon.com

PBN Plate 1.  Product Instruction                   PBN is easy procession, can be machined to many kinds shape of parts.      They are applied widely as structural components in high temperature and vacuum environment.       2.   Product Feature                  High Purity (99.999%)      Uniform thickness        High resistivity and insulativity      Low outgassing in high temperature      Inert, no reaction with acid and alkali   Custom sizes are available* www.semixicon.com

PBN Rod         1.  Product Instruction                   PBN is easy to be machined as High-power microwave components.      Such as  (TWT) support rod material.        2.  Product Features             High Purity (99.999%)       Excellent thermal conductivity      Low dielectric constant      Easy machining and high accuracy      Not easy to deformation in high temperature     www.semixicon.com